Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 4: Determination of 34 elements in ultra pure water by mass spectrometry with inductively coupled plasma (ICP-MS)

Standard [CURRENT]

DIN 50451-4:2024-09

Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 4: Determination of 34 elements in ultra pure water by mass spectrometry with inductively coupled plasma (ICP-MS)

German title
Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Elementspuren in Flüssigkeiten - Teil 4: Bestimmung von 34 Elementen in hochreinem Wasser durch Massenspektrometrie mit induktiv gekoppeltem Plasma (ICP-MS)
Publication date
2024-09
Original language
German
Pages
15

from 74.80 EUR VAT included

from 69.91 EUR VAT excluded

Format and language options

PDF download

  • 74.80 EUR

  • 90.70 EUR

Shipment (3-5 working days)

  • 96.00 EUR

Monitor with the Standards Ticker

This option is only available after login.
Easily subscribe: Save time and money now!

You can also subscribe to this document - together with other important standards in your industry. This makes your work easier and pays for itself after a short time.

Sparschwein_data
Subscription advantages
Sparschwein Vorteil 1_data

Important standards for your industry, regularly updated

Sparschwein Vorteil 2_data

Much cheaper than buying individually

Sparschwein Vorteil 3_data

Useful functions: Filters, version comparison and more

Publication date
2024-09
Original language
German
Pages
15
DOI
https://dx.doi.org/10.31030/3550942
Loading recommended items...

Product information on this site:

Quick delivery via download or delivery service

Buy securely with a credit card or pay upon receipt of invoice

All transactions are encrypted

Overview

This document specifies a test method for determining the mass fractions of 34 elements in the extreme trace range in ultrapure water, using inductively coupled plasma mass spectrometry (ICP-MS) as the determination method. The method applies to elemental trace mass fractions from 10 ng/kg to 1 000 ng/kg. This document has been prepared by Working Committee NA 062-02-21 AA "Prüfung von Prozesschemikalien für die Halbleitertechnologie" ("Testing of process materials for semiconductor technology") at DIN Standards Committee Materials Testing (NMP).

Content

ICS

29.045

DOI

https://dx.doi.org/10.31030/3550942
Replacement amendments

This document replaces DIN 50451-4:2007-02 .

Cooperation at DIN

Relationship to other standards
This document references:
Loading recommended items...